Resin sealed semiconductor device and manufacturing method therefor

ABSTRACT

A semiconductor device includes a thermoplastic resin case, a semiconductor chip mounted within the thermoplastic resin case, a metal terminal having a wire bonding surface and an opposing contact surface, and a wire connected between the wire bonding surface and the semiconductor chip. The contact surface of the metal terminal is thermoplastically bonded at an area to the inside of the thermoplastic resin case.

FIELD OF THE INVENTION

The present invention relates to a semiconductor device in which asemiconductor chip is wire bonded to metal terminals mounted on theexterior resin case, and more particularly to a semiconductor device inwhich such metal terminals are firmly secured to the resin case. Theinvention also relates to a method for manufacturing such asemiconductor device.

BACKGROUND ART

In the manufacture of semiconductor devices such as power semiconductordevices, it is common to insert (or mount) metal terminals into theexterior resin case at predetermined locations after the case is molded.(The method of inserting metal parts into a resin case, etc. after it ismolded is referred to as “outserting.”)

The “outserted” metal terminals are wire bonded to the semiconductorchip mounted within the resin case. It should be noted that in order toensure accurate wire bonding and sufficient bonding strength, it isnecessary to secure the metal terminals to the resin case so that theyare not displaced from their predetermined positions by the wire bondingoperation. Therefore, the resin case has structures thereon for engagingthe metal terminals so as to restrict their displacement.

There will now be described, with reference to FIGS. 10 and 11, anexemplary engaging structure that receives therein and engages a metalterminal 100 so as to limit displacement of the terminal (or secure it).Referring to FIG. 10, the metal terminal 100 having a wire bondingsurface 108 is inserted into a resin case 102 in the direction indicatedby the arrow. More specifically, the metal terminal 100 is insertedbetween a pair of protrusions 104 (an engaging structure) on the resincase 102. FIG. 11 shows the metal terminal 100 that has been insertedand engaged between the protrusions 104. It should be noted that afterthe insertion of the metal terminal 100, its wire bonding surface 108 issecured between a pair of wire-bonding-surface holding protrusions 106on the resin case. Other methods or structures for securing a terminalframe, etc. are disclosed in JP-A Nos. 59-008399 (1984), 62-158389(1987), 2002-231217, 60-223143 (1985), 2002-291135, 01-243383 (1989).

Accurate wire bonding on a metal terminal requires that the terminal besecured to the resin case, as described above. However, in order tosecure the metal terminal to the resin case with sufficient force, it isnot enough merely to insert the terminal in place between protrusions onthe resin case (as described with reference to FIG. 11). Specifically,as shown FIG. 12, which is a cross-sectional view taken along line 12-12of FIG. 11, there are gaps A, B, and C between the protrusions 104 andthe metal terminal 100, which prevents the metal terminal 100 from beingsufficiently secured to the resin case. Further, as shown in FIG. 13,which is a plan view of the view of FIG. 11, there are also gaps Dbetween the metal terminal 100 and the wire-bonding-surface holdingprotrusions 106, which also serve to prevent securing of the terminal.These gaps A, B, C, and D cannot be eliminated due to processvariations.

Refer now to FIG. 14, which is a view of the same cross section as FIG.12. In order to firmly secure the metal terminal 100 to the resin case(or between the protrusions 104 thereon) 102, an adhesive 110 may beapplied to fill the gaps (A, B, C, and D) described above. However, theapplication of an adhesive requires a considerable amount of work, andit takes time for the adhesive to harden. This complicates themanufacturing process, resulting in increased takt time. It has alsobeen found that the adhesive may spread and adhere to wire bondingsurfaces and solder bonding surfaces resulting in reduced product yield.

Another way to firmly secure the metal terminal 100 to the resin case102, which is made of a thermoplastic resin, is to fuse the resin aroundthe terminal 100 using heated metal pieces 112 as shown in FIG. 15. Thiscauses the metal terminal 100 to be thermoplastically bonded and securedto the resin case 102. However, this method is disadvantageous in thatsince the metal terminal 100 is only partially bonded to the resin case102, the securing force is insufficient. The temperature of the metalpieces 112 may be increased to more widely bond the metal terminal 100to the resin case 102. However, this may cause the melting of unintendedportions of the resin case 102, resulting in deformation and reducedstrength. Furthermore, molten resin material may adhere to the wirebonding surface and solder bonding surface of the metal terminal 100resulting in reduced product yield.

SUMMARY OF THE INVENTION

The present invention has been devised to solve the above problems. Itis, therefore, an object of the present invention to provide asemiconductor device in which metal terminals are firmly bonded andsecured to the resin case in a simple manner without any trouble so thatthese metal terminals are properly wire bonded to the semiconductor chipin the resin case. Another object of the present invention is to providea method for manufacturing such a semiconductor device.

According to one aspect of the present invention, a semiconductor deviceincludes a thermoplastic resin case, a semiconductor chip mounted withinsaid thermoplastic resin case, a metal terminal having a wire bondingsurface and an opposing contact surface, and a wire connected betweensaid wire bonding surface and said semiconductor chip. Said contactsurface of said metal terminal is thermoplastically bonded at an area tothe inside of said thermoplastic resin case.

According to another aspect of the present invention, a method formanufacturing a semiconductor device includes the steps of a terminalmounting step of mounting a metal terminal on a thermoplastic resin caseat a predetermined location such that a portion of said metal terminalis in contact with said thermoplastic resin case, a thermoplasticbonding step of heating said mounted metal terminal by induction heatingto a temperature higher than the melting point of said thermoplasticresin case so that said portion of said metal terminal isthermoplastically bonded to said thermoplastic resin case, a chipmounting step of mounting a semiconductor chip within said thermoplasticresin case, and a wire bonding step of connecting said bonded metalterminal to said semiconductor chip by wire bonding.

Other and further objects, features and advantages of the invention willappear more fully from the following description.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows the configuration of the semiconductor device of theembodiment;

FIG. 2 is a plan view of the view of FIG. 1;

FIG. 3 is a cross-sectional view taken along line 3-3 of FIG. 1;

FIG. 4 is a flowchart that shows a method for manufacturingsemiconductor device;

FIG. 5 shows the insert direction of metal terminal;

FIG. 6 is a diagram that shows AC magnetic field generator placed withinthe resin case;

FIG. 7 shows one example of the configuration of metal terminal:

FIG. 8 shows the metal terminal and adjacent structures of the resincase after the terminal has been inserted into the resin case and afterinduction heating has been applied to the terminal;

FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 8;

FIG. 10 is a diagram explaining metal terminal insertion regardingrelated art;

FIG. 11 shows the metal terminal that has been inserted and engagedbetween the protrusions;

FIG. 12 is a cross-sectional view taken along line 12-12 of FIG. 11;

FIG. 13 is a plan view of the view of FIG. 11;

FIG. 14 is a diagram view of the same cross section as FIG. 12 whichuses adhesive; and

FIG. 15 shows another way to fuse the resin.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

Embodiment

This embodiment of the present invention relates to a semiconductordevice in which metal terminals “outserted” into the exterior resin caseare wire bonded to the semiconductor chip mounted within the resin case.This embodiment also relates to a method for manufacturing such asemiconductor device. The configuration of the semiconductor device ofthe present embodiment will be described with reference to FIG. 1. Thissemiconductor device includes an exterior resin case 12 (of athermoplastic resin) having protrusions 14 on its inner sidewalls. Eachprotrusion 14 is of a T shape whose stem portion projectsperpendicularly from a respective inner sidewall of the resin case 12,as shown in FIGS. 1 and 2. The resin case 12 also includes lowprotrusions which are referred to herein as “wire-bonding-surfaceholding portions 16.” Each pair of wire-bonding-surface holding portions16 form therebetween a groove in which the wire bonding surface(described later) of a metal terminal 10 is secured.

Each metal terminal 10 is secured to the resin case 12 described aboveand has a wire bonding surface 22 to which a wire 18 is wire bonded.Specifically, as shown in FIG. 1, the metal terminal 10 has thefollowing three portions: an external connection portion extendingoutwardly from the resin case 12; an engaging portion for engagingbetween a pair of protrusions 14; and a wire bonding portion having thewire bonding surface 22.

One end of the wire 18 is connected to the wire bonding surface 22, andthe other end is connected to a predetermined point on a semiconductorchip 20 mounted within the resin case 12, thus allowing thesemiconductor chip 20 to be electrically connected to an external devicethrough the wire 18 and the metal terminal 10.

FIG. 2 is a plan view of the view of FIG. 1. As shown in FIG. 2, asolidified molten resin portion 24 is provided at the interface betweenthe engaging portion of the metal terminal 10 and the resin case 12 tothermoplastically bond and secure the engaging portion of the terminal10 to the resin case 12. Specifically, the solidified molten resinportion 24 is formed as a result of melting and cooling the portion ofthe resin case 12 in contact with the engaging portion of the metalterminal 10.

FIG. 3 is a cross-sectional view taken along line 3-3 of FIG. 1. FIG. 3shows a solidified molten resin portion 25 provided at the interfacebetween the wire bonding portion of the metal terminal 10 and thewire-bonding-surface holding portion 16, etc. of the resin case 12 tothermoplastically bond and secure the wire bonding portion of theterminal 10 to the resin case 12. Like the solidified molten resinportion 24, the solidified molten resin portion 25 is formed as a resultof melting and cooling the portion of the resin case 12 in contact withthe wire bonding portion of the metal terminal 10. This completes thedescription of the configuration of the semiconductor device of thepresent embodiment. A method for manufacturing this semiconductor devicewill now be described with reference to the flowchart shown in FIG. 4.

First, metal terminals 10 are inserted into the molded resin case 12 (ofa thermoplastic resin) at step 30. This step will be described withreference to FIG. 5. As shown in FIG. 5, the metal terminals 10 areinserted into the resin case 12 in the direction indicated by thearrows. It should be noted that in all the accompanying figures,components common to FIG. 1 are designated by the same referencenumerals. As a result of step 30, the engaging portion of each metalterminal 10 is engaged between a respective pair of protrusions 14 ofthe molded resin case 12, and the wire bonding portion of each metalterminal 10 is engaged between a respective pair of wire-bonding-surfaceholding portions 16.

The manufacturing method then proceeds to step 32. At step 32, an ACmagnetic field generator 40 is placed within the resin case 12. Thisstep will be described with reference to FIG. 6. The AC magnetic fieldgenerator 40 has a conductor and is adapted to pass an AC currentthrough this conductor to generate a magnetic field around it.Specifically, the AC magnetic field generator 40 has a conductorincluding a rectangular loop portion. This rectangular loop conductorportion of the AC magnetic field generator 40 is sized such that it canbe placed as close to the inner sidewalls of the resin case 12 aspossible without contacting the metal terminals 10.

The manufacturing method then proceeds to step 34. At step 34, therectangular loop conductor portion of the AC magnetic field generator 40placed within the resin case 12 is caused to generate a time-varyingmagnetic field, which induces an eddy current in the magnetic terminals10 (i.e., electromagnetic induction). According to the presentembodiment, the AC magnetic field generator 40 applies a current at afrequency of approximately 300 kHz to the conductor for approximately 10seconds to induce a current of approximately 500-600 A in the metalterminals 10. As a result, the metal terminals 10 are heated toapproximately 300° C., thereby melting the portions of the resin case 12in contact with the metal terminals 10. It should be noted that theremay be gaps between the metal terminals 10 and the resin case 12, suchas the gaps A, B, C, and D described with reference to FIGS. 12 and 13.However, even in such a case, the metal terminals 10 and the resin case12 are sufficiently close to each other so that the portions of theresin case 12 in contact with or adjacent to the metal terminals 10 meltwhen the terminals are heated as described above.

Then, at step 36, the AC magnetic field generator 40 is retrieved fromwithin the resin case 12.

The manufacturing method then proceeds to step 38. At step 38, asemiconductor chip is mounted on the inner bottom of the resin case 12in the same manner as the semiconductor chip 20 shown in FIG. 1. Itshould be noted that the semiconductor chip may be placed at anyposition that allows wire bonding on the chip as described later.

The manufacturing method then proceeds to step 40. At step 40, the wirebonding surface 22 of each metal terminal 10 is wire bonded to thesemiconductor chip 20.

When each metal terminal is wire bonded to the semiconductor chip, thewire is bonded to the metal terminal while applying heat, ultrasonicwave energy, and pressure to the terminal. Successful formation of asufficient amount of alloy between the wire and the metal terminalrequires that ultrasonic vibration be properly applied to the metalterminal when the wire is bonded to the terminal. However, in the caseof conventional semiconductor devices, it frequently happens that“outserting” a metal terminal into the resin case does not result insufficient securing force being applied to the terminal. This may leadto the capillary (or tip) of the wire bonding apparatus moving inresponse to displacement of the metal terminal, thereby preventingproper application of ultrasonic vibration to the terminal. It has beenfound that as a result, the wire cannot be bonded to the metal terminal,or the bonding strength is not sufficient.

The present embodiment solves the above problems. According to thepresent embodiment, solidified molten resin portions are provided at aplurality of interfaces between each metal terminal and the resin caseto thermoplastically bond and secure the metal terminal to the resincase, as described with reference to FIGS. 2 and 3. That is, with thesolidified molten resin portions, the metal terminal is bonded to theresin case at these interface areas, resulting in the metal terminalbeing firmly secured to the resin case. This ensures that the metalterminal is not displaced by the wire bonding operation, therebyallowing a sufficient amount of alloy to be accurately formed betweenthe wire and the metal terminal. It was found that the bonding strengthbetween the metal terminal and the resin case was approximately 30-40 Nwhen they were bonded together by the application of heat as describedabove with reference to FIG. 15, and 80-100 N when they are bondedtogether by the bonding method of the present embodiment. Thus,according to the present embodiment, each metal terminal can be securelyfixed to the resin case.

Further, the present embodiment is characterized in that the metalterminals themselves are inductively heated to thermoplastically bondthem to the resin case of a thermoplastic resin as described withreference to the flowchart of FIG. 4. Induction heating allows the metalterminals to be heated without making any contact with them, meaningthat the terminals can be secured at precisely controlled positions. Onthe other hand, if the metal terminals are heated by pressing heatedmetal pieces to them, the metal terminals may be displaced from theirdesired positions. The heating method of the present embodiment does notpresent this problem, since the metal terminals are heated withoutcontacting them.

Further, since the metal terminals are inductively heated by an ACmagnetic field generator placed within the resin case, the AC magneticfield generator can be closely spaced from the metal terminals, allowingeffective heating of the terminals. When inductively heating theseterminals, the AC magnetic field generator can be set close to the wirebonding portions of the metal terminals, as compared to the case wherethe AC magnetic field generator is placed outside the resin case.Therefore, an appropriate solidified molten resin portion can be formedat the interface between the wire bonding portion of each metal terminaland the resin case to thermoplastically bond and secure the wire bondingportion of the terminal to the resin case at this interface area. Thisensures proper application of ultrasonic vibration to each metalterminal when a wire is wire bonded to the terminal. Thus, the presentembodiment allows reliable and accurate wire bonding on each metalterminal with increased bonding strength between the wire and theterminal.

The metal terminal securing method of the present embodiment has anadvantage over the use of an adhesive in that it can be implemented by asimpler process and that there is no fear of scattering of adhesive andresulting defects. Further, this method allows the metal terminals to beeffectively and reliably bonded to the resin case, as compared to thecase where heated metal pieces are pressed against the resin case tomelt specific portions of the resin case. Specifically, pressing heatedmetal pieces against the resin case may cause the melting of unintendedportions of the resin case (i.e., portions of the resin case that arenot related to the bonding between the metal terminals and the resincase), resulting in deformation and reduced strength. On the other hand,the method of the present embodiment for manufacturing a semiconductordevice can effectively and reliably bond the metal terminals to theresin case, since the bonding is carried out in such a way as to avoidmelting the portions of the resin case that are not related to thebonding.

It should be noted that each metal terminal may have the configurationshown in FIG. 7 to further increase the bonding strength between themetal terminal and the resin case. The metal terminal 50 shown in FIG. 7includes an external connection portion, an engaging portion, and a wirebonding portion, like the metal terminals 10 described above. However,the metal terminal 50 is characterized in that it has notches, orconcave portions, 52 in its engaging portion. Referring to FIG. 7, inthe manufacture of this semiconductor device, the metal terminal 50(having the notches 52) is inserted into a resin case 102 in thedirection indicated by the arrow. The remaining process steps are thesame as those previously described with reference to the flowchart ofFIG. 4.

FIG. 8 shows the metal terminal 50 and adjacent structures of the resincase 102 after the terminal has been inserted into the resin case 102and after induction heating has been applied to the terminal. FIG. 9 isa cross-sectional view taken along line 9-9 of FIG. 8. As shown in FIG.9, the induction heating (and subsequent cooling) forms a solidifiedmolten resin portion along the edges of the notches 52. Thus, the metalterminal 50 having the notches 52 has more bonding areas than a metalterminal having no notches. This means that the metal terminal 50 can bemore firmly secured to the resin case.

Thus, according to the present invention, the metal terminals are firmlysecured to the resin case since they are bonded at large areas to thecase. This allows for reliable and accurate wire bonding on each metalterminal, thereby firmly bonding the wire to the terminal. This featurecontributes to extending the useful life, reducing the powerconsumption, and increasing the production yield of the semiconductordevice. Further, the metal terminals are bonded to the resin case byinduction heating, thus simplifying the manufacturing process. It shouldbe noted that since this semiconductor device is manufactured withoutusing adhesive, it is easy to separate the device into individualcomponents and retain or destroy them at the time of disposal.

According to the present embodiment, the AC magnetic field generator hasa conductor including a rectangular loop portion, and this loop portionis placed within the resin case to generate a magnetic field forinduction heating. With this arrangement, the metal terminals can beeffectively bonded to the resin case by induction heating, since the ACmagnetic field generating source, i.e., the rectangular loop conductorportion, is set within the resin case. It should be understood, however,that the present invention is not limited to this particulararrangement, and the AC magnetic field generating source may be placedoutside the resin case if sufficient induction heating is ensured.Further, in either case, the rectangular loop portion of the conductorof the AC magnetic field generator may be omitted while retainingadvantages of the present invention.

Further, the step 38 of mounting a semiconductor chip described withreference to FIG. 4 may be performed at any time before the step 40 ofwire bonding.

Thus, the present invention allows a semiconductor device to bemanufactured in such a way that metal terminals are firmly bonded andsecured to its exterior resin case in a simple manner so that thesemetal terminals can be properly wire bonded to the semiconductor chip inthe resin case.

Obviously many modifications and variations of the present invention arepossible in the light of the above teachings. It is therefore to beunderstood that within the scope of the appended claims the inventionmay be practiced otherwise than as specifically described.

The entire disclosure of a Japanese Patent Application No. 2008-046390,filed on Feb. 27, 2008 including specification, claims, drawings andsummary, on which the Convention priority of the present application isbased, are incorporated herein by reference in its entirety.

1. A resin sealed semiconductor device comprising: a thermoplastic resincase having a bottom portion and a side wall with a protrusion; asemiconductor chip mounted within said thermoplastic resin case; a metalterminal having a wire bonding surface and an opposing contact surface,and having an engagement portion with a recessed notch; a wire connectedbetween said wire bonding surface and said semiconductor chip; a firstsolidified molten resin portion provided at an interface between saidcontact surface and the bottom portion of said resin case; and a secondsolidified molten resin portion provided at an interface between saidengagement portion and the protrusion of the side wall such that therecessed notch is filled with the second solidified molten resinportion; wherein said contact surface is bonded to said resin case bysaid first solidified molten resin portion and said engagement portionis bonded to the side wall by said second solidified molten resinportion.
 2. The resin sealed semiconductor device as claimed in claim 1,wherein: said metal terminal has a concave portion; wherein saidsolidified molten resin portion fills said concave portion.
 3. The resinsealed semiconductor device as claimed in claim 1, wherein: one or moreportions of said metal terminal are bonded to said thermoplastic resincase by said solidified molten resin portion.
 4. The resin sealedsemiconductor device as claimed in claim 1, wherein the protrusion has aT-shaped cross section seen from a direction that is perpendicular tothe bottom portion of the thermoplastic resin case, and the secondsolidified molten resin portion is formed between a stem portion of theprotrusion and the engagement portion of the metal terminal.
 5. A resinsealed semiconductor device comprising: a thermoplastic resin casehaving a bottom portion and a side wall with a protrusion; asemiconductor chip mounted within said thermoplastic resin case; a metalterminal having a wire bonding surface and an opposing contact surface,and having an engagement portion with a recessed notch; a wire connectedbetween said wire bonding surface and said semiconductor chip; and asolidified molten resin portion provided at an interface between saidengagement portion and the protrusion of the side wall such that therecessed notch is filled with the solidified molten resin portion;wherein said engagement portion is bonded to the side wall by saidsolidified molten resin portion.
 6. The resin sealed semiconductordevice as claimed in claim 5, wherein the protrusion has a T-shapedcross section seen from a direction that is perpendicular to the bottomportion of the thermoplastic resin case, and the solidified molten resinportion is formed between a stem portion of the protrusion and theengagement portion of the metal terminal.